Scanning electron microscopy (SEM)

Researchers using Jeol 7100 FEGSEM

LMCC has five FEGSEM instruments spanning a variety of capabilities and specifications. These are very much the workhorse instruments within the centre and capacity has been increased to meet user demands.

Scanning Electron Microscopy (SEM) is a microscopy technique in which a beam of electrons are directed at a specimen of interest. The electron beam interacts with the specimen, generating a number of secondary emissions. An SEM provides the ability for high resolution with a long depth of field images to be acquired. All of our FEGSEMs have auxiliary Energy Dispersive Spectroscopy (EDS) detectors and Electron BackScatter Diffraction (EBSD) cameras.

A FEGSEM is an indispensable analytical tool for research and solving industrial problems where optical microscopes will not provide the required resolution. LMCC has recently invested in two new FEGSEMs to increase the capacity within the centre; this is inaddition to the combined PFIB and FIB/FEGSEM (Dualbeam) systems which are also located within the centre.

Typical industrial uses

  • Surface structure
  • Paint defects
  • Corrosion products
  • Powder analysis
  • Particle size analysis
  • Thickness measurements of depositied layers
  • Failure analysis

Key Capabilities

  • Topographical Imaging - Secondary Electron Imaging
  • Secondary phases/precipitatee Imaging - Backscattered Imaging (BSE)
  • Chemical Mapping - Energy Dispersive Spectroscopy (EDS)
  • Crystallographic orientation - Electron Backscattered Diffraction (EBSD)

LMCC currently has five FEGSEM instruments, details of which can be obtained below:

Loading samples into jeol 7800 FEGSEM

JEOL JSM 7800F FEGSEM

Built-in detectors:

  • Lower Electron Detector (LED)
  • Upper Electron Detector (UED)
  • Upper Secondary Detector (USD)
  • Large Depth Focus (LDF)
  • Retractable Electron Backscatter Detector (RBEI)

Analytical detectors:

  • Energy Dispersive Spectroscopy (EDS) - Oxford Instruments X-Max 80
  • Electron Backscatter Diffraction (EBSD) - Oxford Instruments Nordlys CCD detector

JEOL JSM 7100F FEGSEM

Built-in detectors:

  • Lower Electron Detector (LED)
  • Large Depth Focus (LFD)
  • Retractable Electron Backscatter Detector (RBEI)

Analytical detectors:

  • Energy Dispersive Spectroscopy (EDS) - Oxford Instruments X-Max 80
  • Electron Backscatter Diffraction (EBSD) - Oxford Instruments Nordlys CCD detector

Zeiss (Leo) 1530VP FEGSEM

Built-in detectors:

  • Everhart Thornley Detector (ETD)
  • In-lens annular Detector
  • Retractable Backscatter Detector (RBEI)

Analytical detectors:

  • Energy Dispersive Spectroscopy (EDS) - Oxford Instruments X-Max 80

Variable Pressure Capability

FEI Quanta 200F Environmental FEGSEM

Built-in detectors:

  • Everhart Thornley Detector (ETD)
  • Electron Backscatter Detector (BSD)

Environmental detectors:

  • Large Field Detector (LFD)
  • Gaseous Secondary Electron Detector (GSED)
  • Gaseous Backscatter Detector (GBSD)

Variable Pressure Capability

 

Hitachi TM30 Benchtop FEGSEM

Built-in detectors:

  • Electron Backscatter Detector (BSD)

Analytical detectors:

  • Energy Dispersive Spectroscopy (EDS) - Oxford Instruments Swift ED3000

 

Case Studies

Are you interested in using this technique?

If you are interested in using this technique and would like further information please do not hesitate to get in touch.

º¬Ðß²ÝÊÓƵ Researchers Industrial Users / External Researchers