Department of Materials

Facilities

º¬Ðß²ÝÊÓƵ Materials Characterisation Centre (LMCC)

Benchtop SEM

Hitachi TM3030Plus Benchtop Scanning Electron Microscope

Specification:

Magnification: 15x - 30.000x (digital zoom x2 or x4)
Resolution: 30nm
Maximum sample size: 70mm in diameter
Maximum sample height: 50mm
Signal detection: High-Sensitivity semiconductor 4-segment BSE detector

Upgrades:

Fitted with an Oxford Instruments Swift ED3000 Silicon drift detector (SDD) allowing Energy Dispersive X-ray Spectrometry (EDS). Light element detection from Boron upwards with standardless quantitative analysis. Linescan, Mapping and multiple Point Analysis available. Deben Sprite XY stage automation provides joystick control using a high resolution stepper motor control with 10nm step size and a repositioning accuracy to 1μm. 99 position memory store for recalling points of interest.